孙小燕 1,2梁昶 1,2张伟 1,2孔德键 1,2[ ... ]段吉安 1,2
作者单位
摘要
1 中南大学机电工程学院,湖南 长沙 410083
2 高性能复杂制造国家重点实验室,湖南 长沙 410083
超短脉冲激光凭借其脉宽窄、峰值功率高的特点,可以实现高精度材料生长、改性和去除等形式的加工,具有良好的材料适应性和工艺兼容性,在微电/光互连领域取得了开拓性应用进展,已成为近年来先进制造的新兴关键技术。本文简要介绍超短脉冲激光实现微光电子器件制造的基本机制,包括多光子还原、表面等离子体共振和双光子聚合等,重点阐述超短脉冲激光加工在微光/电互连领域的应用研究进展,并对超短脉冲激光加工在该领域的发展方向进行总结和展望。
激光技术 超短脉冲激光 多光子还原 表面等离子体共振 双光子聚合 光波导 
中国激光
2022, 49(10): 1002502
作者单位
摘要
1 中南大学 机电工程学院, 长沙 410083
2 中南大学 高性能复杂制造国家重点实验室, 长沙 410083
为了研究蝶形光通信激光器的耦合机理, 建立了芯片-透镜-单模光纤仿真模型, 以耦合理论为基础, 引入了容忍度概念, 分析了空间位置误差对耦合效率的影响。通过对比透镜与光纤的各个方向的容忍度大小, 结合焊后偏移现象, 提出了先透镜后光纤的封装顺序, 并搭建了实验平台进行验证。结果表明, 在对比实验中, 透镜优先封装所得到的功率最高可达1800μW, 而光纤优先封装最高功率仅为1200μW;先对透镜进行封装, 焊后偏移的效果要更好。该研究为蝶形器件实际封装生产提供可靠的参考。
光学器件 封装工艺 容忍度 耦合规律 optical devices packaging process tolerance coupling regular 
激光技术
2021, 45(6): 715
Author Affiliations
Abstract
State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
In this study, an effective method is proposed for controlling a titanium foil surface’s wettability. A microholes array series is fabricated on the surface of titanium foil by a femtosecond laser under different laser energy and pulse number. The changes of the titanium surface’s morphology are characterized. When placed in a darkroom with high-temperature treatment and immersed in alcohol under UV irradiation, respectively, the femtosecond laser treated surfaces display switchable wettability. It is demonstrated that the changing between Ti-OH and Ti-O prompts the transformation between superhydrophilic and superhydrophobic. Compared with existing reports, the switchable wetting cycle is shortened to 1.5 h. The functional surfaces with switchable wettability have potential applications in oil–water separation and water mist collection.
femtosecond laser titanium foil microholes array switchable wettability 
Chinese Optics Letters
2021, 19(8): 082201
Author Affiliations
Abstract
State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
A phase-shifted fiber Bragg grating (PS-FBG) based on a microchannel was proposed and realized by combining the point-by-point scanning method with chemical etching. The PS-FBG is composed of a fiber Bragg grating (FBG) and a microchannel through the fiber core. The microchannel can introduce phase shift into the FBG. What is more important is that it exposes the fiber core to the external environment. The phase shift peak is sensitive to the liquid refractive index, and it shows a linear refractive index response wavelength and intensity sensitivity of 2.526 nm/RIU and -111 dB/RIU, respectively. Therefore, such gratings can be used as sensors or tunable filters.
fiber Bragg grating microchannel structure phase shift fiber optic sensors 
Chinese Optics Letters
2021, 19(3): 030602
作者单位
摘要
中南大学机电工程学院高性能复杂制造国家重点实验室, 湖南 长沙 410083
随着功能性微结构的制造品质要求不断推向新的极端,超快激光微纳制造迎来了新的挑战,如更高的加工效率、跨尺度加工、选择性加工及可控性加工等。因传统超快激光高斯光束的空间和时间能量分布在加工中的局限性,以单点聚焦扫描为主的加工方法难以满足新的制造精度、效率和跨尺度加工要求。基于此,研究者将目光聚焦到超快激光光束整形的制造方法上。本文从传统超快激光光束的特点及其加工局限性角度出发,分空域光束整形、时域光束整形和时空域协同光束整形,介绍了超快激光光束整形技术的基本原理和主要实现途径;阐述了这些技术在功能性微结构制造方面的典型应用和研究进展;最后,总结和讨论了超快激光光束整形技术应用于功能性微结构制造中存在的问题和发展前景。
激光光学 超快激光 光束整形 功能性微结构 高效制造 
中国激光
2021, 48(2): 0202005
Author Affiliations
Abstract
State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
A novel fiber inline Mach-Zehnder interferometer (MZI) is proposed for simultaneous measurement of curvature and temperature. The sensor composes of single mode-multimode-dispersion compensation-multimode-single mode fiber (MMF-DCF-MMF) structure, using the direct fusion technology. The experimental results show curvature sensitivities of -12.82 nm/m-1 and -14.42 nm/m-1 in the range of 0 - 0.65 m-1 for two resonant dips, as well as temperature sensitivities of 57.6 pm/℃ and 74.3 pm/℃ within the range of 20 ℃ - 150 ℃. In addition, the sensor has unique advantages of easy fabrication, low cost, high fringe visibility of 24 dB, and high sensitivity, which shows a good application prospect in dual-parameters of sensing of curvature and temperature.
Mach-Zehnder interferometer curvature sensing temperature sensing simultaneous sensing 
Photonic Sensors
2020, 10(2): 171
Author Affiliations
Abstract
State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
In this study, we propose an effective method for the fabrication of annulus micro-/nanostructures by a femtosecond laser doughnut beam. Compared with the traditional Bessel annulus beam shaping system, this method greatly compresses the light propagation path. It is theoretically and experimentally demonstrated that the obtained axial section of the peak envelope in the processing area is two waists of the isosceles triangle. By moving the relative position of the sample, annulus microstructures with different diameters on copper sheet could be fabricated. In addition, laser induced periodic surface structures with controllable direction are fabricated by this optical system.
femtosecond laser pulse shaping doughnut beam laser induced periodic surface structures 
Chinese Optics Letters
2020, 18(1): 013101
Author Affiliations
Abstract
State Key Laboratory of High Performance Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
In order to improve the morphology of microchannels fabricated by femtosecond laser ablation, the thermal process was introduced into the post-treatment processing. It was found that the thermal process cannot only decrease the roughness but also the width and depth of the microchannel. The change rates of width, depth, and roughness of the microchannel increase with processing temperature. When we prolong the time of constant temperature, the change rate of the width decreases at the beginning, and then it tends to be stable. However, the change rates of depth and roughness increase, and then they tend to be stable. In this Letter, we discuss the reasons of the above phenomena.
140.3390 Laser materials processing 230.7380 Waveguides, channeled 
Chinese Optics Letters
2018, 16(10): 101402
Author Affiliations
Abstract
State Key Laboratory of High Performance and Complex Manufacturing, Central South University, Changsha 410083, China
A simple technique is proposed for highly-efficient plane processing fully based on femtosecond laser beam shaping. The laser intensity distribution is transformed from a Gaussian to a donut shape. As the donut-shaped focus seems like a flat top from the side view, a plane with a high level of flatness is obtained directly by scanning once. By applying it to polishing experiments, the surface roughness can be improved significantly. The influence of scanning speed, laser pulse energy, and scanning times on the roughness is also discussed. Moreover, the scanning width can be flexibly controlled in a wide range.
140.7090 Ultrafast lasers 140.3300 Laser beam shaping 
Chinese Optics Letters
2018, 16(3): 031401
Author Affiliations
Abstract
State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
A constant elastic alloy is a widely used material with a high elastic modulus and an excellent wave velocity consistency. Different morphologies on the constant elastic alloy surface are observed through femtosecond laser irradiation. When the laser average fluence is set to 0.58 J/cm2 and 200 laser pulses, with the increasing depth of distilled water, the period of the laser-induced periodic surface structures (LIPSS) becomes shorter accordingly. The higher the ethanol concentration is, the more spot-shaped structures will be formed among the surface structures when the depth of the coverage of ethanol is 2 mm. The period of the LIPSS reaches its maximum when the concentration of ethanol is 80%.
320.2250 Femtosecond phenomena 220.4241 Nanostructure fabrication 100.0118 Imaging ultrafast phenomena 
Chinese Optics Letters
2017, 15(2): 021404

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